The invention discloses a chip flatness detection device and method, and belongs to the technical field of chip detection equipment. The chip flatness detection device comprises a mounting box and further comprises: a sliding groove formed in the top of the mounting box; a pneumatic telescopic rod sliding in the sliding groove; a mounting case rotationally connected to the output end of the pneumatic telescopic rod; connecting cylinders rotationally connected to the mounting box, wherein the bottoms of the connecting cylinders extend out of the mounting box to be fixedly connected with suction cups, the multiple sets of connecting cylinders are arranged, first gears are fixedly connected to the multiple sets of connecting cylinders, and the multiple sets of first gears are meshed with one another; a power assembly arranged in the mounting case and used for driving the connecting cylinders to rotate; and a detection assembly arranged in the mounting box and used for detecting the chips. A connecting shaft and the mounting box can rotate to adjust the opposite surfaces of the chips and a detector, so that the flatness of the bottom surfaces and the side walls of multiple groups of chips can be detected at the same time, and the detection efficiency is improved.

    本发明公开了一种芯片平整度检测装置及检测方法,属于芯片检测设备技术领域。一种芯片平整度检测装置,包括安装箱,还包括:开设在安装箱顶部的滑槽;滑动在滑槽内的气动伸缩杆;转动连接在气动伸缩杆输出端的安装盒;转动连接在安装盒上的连接筒,其中,连接筒的底部延伸至安装箱外固定连接有吸盘,连接筒设有多组,多组连接筒上均固定连接有第一齿轮,多组第一齿轮相互啮合;动力组件,设置在安装盒内,用于驱动连接筒转动;检测组件,设置在安装箱内,用于对芯片进行检测;本发明通过使连接轴和安装箱可以转动,调节芯片与检测仪相对的面,从而可以同时对多组芯片的底面和侧壁进行平整度检测,进而提高检测效率。


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    Titel :

    Chip flatness detection device and method


    Weitere Titelangaben:

    一种芯片平整度检测装置及检测方法


    Beteiligte:
    WANG YINXI (Autor:in)

    Erscheinungsdatum :

    2021-08-10


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS , Messen der Länge, der Dicke oder ähnlicher linearer Abmessungen / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES



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