The invention discloses a clean room filtering device. The clean room filtering device comprises rail equipment, a buffer area, air conveying equipment, air filtering equipment and pressure control equipment, wherein the rail equipment is arranged among a plurality of clean rooms and used for moving loading equipment into the clean rooms; the buffer area is located at the joints of the clean rooms, and the buffer area is connected with the rail equipment in a clamped mode; the air conveying equipment is connected with the buffer area, and the air conveying equipment is used for conveying air;the air filtering equipment is located at the top end of the buffer area and communicates the air conveying equipment with the buffer area; the pressure control equipment is located in the buffer area, and the pressure control equipment is connected with the air conveying equipment; and the pressure control equipment controls the pressure in the buffer area to be higher than the pressure of the clean rooms on the two sides of the buffer area. According to the clean room filtering device, the situation that the adjacent clean room areas are polluted due to the fact that loading equipment such as a crown block operates can be effectively avoided.
本发明公开了一种洁净室过滤装置,包括:轨道设备,设于多个洁净室之间,用于将装载设备移动至所述洁净室内;缓冲区域,位于所述洁净室之间的连接处,所述缓冲区域与所述轨道设备卡合连接;空气输送设备,与所述缓冲区域连接,所述空气输送设备用于输送空气;空气过滤设备,位于所述缓冲区域的顶端,且将所述空气输送设备与所述缓冲区域连通;压力控制设备,位于所述缓冲区域内,所述压力控制设备与所述空气输送设备连接;其中,所述压力控制设备控制所述缓冲区域内的压力高于所述缓冲区域两侧的所述洁净室的压力。本发明可以有效避免因装载设备例如天车运行,造成的相邻洁净室区域被污染的情况。
Clean room filtering device
一种洁净室过滤装置
18.12.2020
Patent
Elektronische Ressource
Chinesisch
TIBKAT | 1969
|NTIS | 1969
|