In order to provide a treatment system (100) which is simply constructed and permits an efficient sealing of the treatment space (104), according to the invention, the treatment system (100) comprisesa treatment space (104) for receiving the workpieces (102) to be treated, and a conveying device (110) by means of which the workpieces (102) to be treated can be conveyed through the treatment space(104), wherein the conveying device (110) has a guide device (114) arranged outside the treatment space (104), wherein the conveying device (110) has multiple receiving elements (124) for receiving the workpieces (102), wherein the receiving elements (124) are moveably arranged on the guide device (114) and extend into the treatment space (104) through an opening (126) in a wall (128) surroundingthe treatment space (104).
为了提供一种构造简单并且能够有效密封处理腔(104)的处理设备(100)提出了,处理设备(100)包括:用于容置待处理的工件(102)的处理腔(104);运输装置(110),待处理的工件(102)能借助所述运输装置被运输穿过所述处理腔(104);其中所述运输装置(110)包括引导装置(114),所述引导装置布置在所述处理腔(104)之外;其中所述运输装置(110)包括用于接纳所述工件(102)的多个接纳元件(124),其中所述接纳元件(124)以能移动的方式布置在所述引导装置(114)处,并且所述接纳元件穿过在包围所述处理腔(100)的壁(128)中的开口(126)延伸到所述处理腔(104)中。
TREATMENT SYSTEM AND METHOD FOR TREATING WORKPIECES
用于处理工件的处理设备和方法
2020-06-30
Patent
Elektronische Ressource
Chinesisch
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