Provided is a vacuum pump capable of suppressing the influence of liquid entering from an exhaust port on the operation of a movable part. The vacuum pump is provided with: a pump housing (10) that includes a pump chamber (5), a first anechoic chamber (12) through which gas discharged from the pump chamber (5) passes, and an exhaust port (14) for discharging the gas that has passed through the first anechoic chamber (12) to the outside; and a movable part (4) for sucking gas into the pump chamber (5) and discharging gas from the pump chamber (5), the pump housing (10) being configured so as toinclude a cylindrical part (44) protruding upward within the first anechoic chamber (12) and so as to allow the gas discharged from the pump chamber (5) to flow into the first anechoic chamber (12) through the internal space of the cylindrical part (44).
技术问题:提供一种能够抑制从排气口进入的液体对可动部的动作带来影响的真空泵。解决方案:其具备:泵壳(10),其包含泵室(5)、供从泵室(5)排出的气体通过的第一消声室(12)、以及用于向外部排出通过了第一消声室(12)的气体的排气口(14);以及可动部(4),其用于向泵室(5)吸入气体以及从泵室(5)排出气体,泵壳(10)构成为,包含在第一消声室(12)内朝向上方突出的筒状部(44),并且使从泵室(5)排出的气体通过筒状部(44)的内部空间向第一消声室(12)流入。
Vacuum pump
真空泵
2020-05-12
Patent
Elektronische Ressource
Chinesisch