A novel direct-drive planar parallel manipulator for high-speed and high-precision semiconductor packaging systems is presented. High precision kinematics design, significant redaction on moving mass and driving power of the actuators over traditional XY motion stages are the benefits of the proposed manipulator. The mathematical model of the manipulator is obtained using the Newton-Enter method and a practical model-based control design approach is employed to design the PID computed-torque controller. Experimental results demonstrate that the proposed planar parallel manipulator has significant improvements on motion performance in terms of positioning accuracy, settling time and stability when compared with traditional XY stages. This shows that the proposed planar parallel manipulator can provide a superior alternative for replacing traditional XY motion stages in high precision low-payload applications. © 2005 IEEE. ; published_or_final_version
Modelling and control of a 2-DOF planar parallel manipulator for semiconductor packaging systems
2005-01-01
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
DDC: | 629 |
Dynamics and control of a planar 3-DOF parallel manipulator with actuation redundancy
Online Contents | 2009
|Dynamics and control of a planar 3-DOF parallel manipulator with actuation redundancy
Online Contents | 2009
|Force-unconstrained poses for a redundantly-actuated planar parallel manipulator
Online Contents | 2004
|Modelling and control of underwater vehicle-manipulator systems
British Library Conference Proceedings | 1994
|