Development of multi degree-of-freedom (DOF) high-resolution motors is becoming of increased importance for nanotechnology, micro-robotics, and laser technology. A novel design of 3DOF rotary type piezoelectric motor is proposed. It includes three novel 2DOF inertial piezoelectric actuators, housing, and hemispherical rotor. 2DOF actuator consists of a piezoelectric bimorph disc with the quadrilateral shaped waveguides in the inner circumference of the disc and carbon fiber rod. Such configuration of the bimorph disc is used to transform radial vibrations of the disc into rotational oscillations of the rod. The piezoelectric actuator operates in two vibration modes, i.e., the first out-of-plane bending mode of the disc at 20.5 kHz and the first radial mode of the disc at 138.2 kHz. The bending mode is used to rotate the rotor about x and y axes, while the radial mode is used to obtain rotation about the z-axis. Each piezoelectric actuator is supplied with sawtooth or square waveform voltage, therefore the rotor is driven based on friction – inertia principle. Numerical and experimental investigation of the piezoelectric motor was performed, and results are discussed.


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    Titel :

    3DOF high resolution inertial piezoelectric motor


    Beteiligte:

    Erscheinungsdatum :

    2019-01-01


    Anmerkungen:

    2019 IEEE International Ultrasonics Symposium (IUS), Glasgow, Scotland, October 6-9, 2019, Piscataway, NJ : IEEE, 2019, p. 1773-1776 ; ISSN 1948-5719 ; ISBN 9781728145952 ; eISSN 1948-5727 ; eISBN 9781728145969


    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



    Klassifikation :

    DDC:    629



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