Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA
Conference ; 2000 ; Santa Clara, Calif. Conference (Santa Clara, Calif.) : 2000.09.20
SPIE proceedings series ; 4179
2000
V, 180 S.
Ill., graph. Darst.
Konferenzband
Englisch
DDC: | 621.381/045 |
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