Interferometric metrology : 20-21 August 1987, San Diego, California
International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering ; 31st International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering ; 31st (San Diego, Calif.) : 1987
1988
vi, 239 p
28 cm
ill
Conference 816, Interferometric metrology, was part of a four-conference program on Precision Instrument Design held at SPIE's 31st annual International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering"--P. v
Includes bibliographies
Konferenzband
Englisch
DDC: | 621.36/75 |