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    Titel :

    Interferometric metrology : 20-21 August 1987, San Diego, California



    Kongress:

    International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering ; 31st International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering ; 31st (San Diego, Calif.) : 1987



    Erscheinungsdatum :

    1988


    Format / Umfang :

    vi, 239 p


    Anmerkungen:

    28 cm
    ill
    Conference 816, Interferometric metrology, was part of a four-conference program on Precision Instrument Design held at SPIE's 31st annual International Technical Symposium on Optical & Optoelectronic Applied Science & Engineering"--P. v
    Includes bibliographies



    Medientyp :

    Konferenzband


    Format :

    Print


    Sprache :

    Englisch



    Klassifikation :

    DDC:    621.36/75




    Ultraviolet Technology III : 10-11 August 1989, San Diego, California

    Society of Photo-optical Instrumentation Engineers / New Mexico State University | TIBKAT | 1989