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    Titel :

    Design of experiments based factorial design and response surface methodology for MEMS optimization


    Beteiligte:
    Saleem, M. M. (Autor:in) / Somá, A. (Autor:in)

    Erschienen in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 1 ; 263-276


    Erscheinungsdatum :

    01.01.2015


    Format / Umfang :

    14 pages



    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Print


    Sprache :

    Englisch


    Klassifikation :

    DDC:    629.83



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