Compact optical position feedback scheme for MOEMS mirrors
MICROSYSTEM TECHNOLOGIES ; 20 , 4/5 ; 743-749
01.01.2014
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
MOEMS Reflective Type Variable Optical Attenuator
IEEE | 2005
|MOEMS translatory actuator characterisation, position encoding and closed-loop control
British Library Online Contents | 2010
|British Library Online Contents | 2005
|Moems '99 displays microcapabilities
British Library Online Contents | 1999
Optimization of Non-Uniform Optical Waveguide in MOEMS Accelerometer
British Library Conference Proceedings | 2012
|