Development of piezoelectric MEMS deformable mirror
MICROSYSTEM TECHNOLOGIES ; 17 , 5-7 ; 931-935
01.01.2011
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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MEMS Segmented Deformable Mirror for Adaptive Optics
British Library Conference Proceedings | 2008
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