Design of micromirror actuator by ionic polymer metal composites
17th ASME Conference on Information Storage and Processing Systems, Santa Clara, CA, USA, 18-19 June 2007 ; 10/11 ; 1531-1538
MICROSYSTEM TECHNOLOGIES ; 15 , 10/11
01.01.2009
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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