Numerical simulation and fabrication of microscale, multilevel, tapered mold inserts using UV-Lithographie, Galvanoformung, Abformung (LIGA) technology
MICROSYSTEM TECHNOLOGIES ; 12 , 6 ; 545-553
01.01.2006
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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