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    Titel :

    CANEUS2006-11030 Novel Surface-Micromachined Micromirrors for Optical MEMS Beam Manipulators



    Kongress:

    CONFERENCE, CANEUS 2006 MNT for aerospace applications ; 2006 ; Toulouse, France



    Erscheinungsdatum :

    01.01.2006


    Format / Umfang :

    4 pages


    Anmerkungen:

    Includes bibliographical references and author index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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