AIAA 2006-1246 Development of a MEMS Dual Backplate Capacitive Microphone for Aeroacoustic Measurements
44th, Aerospace sciences meeting ; 2006 ; Reno, NV
Aerospace sciences meeting ; 15105-15118
01.01.2006
14 pages
VOL 20 OF 24 VOLS
Aufsatz (Konferenz)
Englisch
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