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    Titel :

    Micromachining of Silicon Dioxide in Perfluoropropane Plasma for Microelectronic Applications



    Kongress:

    9th, International Conference on Smart Materials, Structures and Systems ; 1999 ; Bangalore, India



    Erscheinungsdatum :

    1999-01-01


    Format / Umfang :

    7 pages


    Anmerkungen:

    in conjunction with the ninth National Seminar on Aerospace Structures; Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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