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    Titel :

    PLD of high-k dielectric films on silicon [5662-65]



    Kongress:

    International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan



    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    6 pages


    Anmerkungen:

    Also known as LPM 2004.




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing [5662-69]

    Watakabe, H. / Sameshima, T. / Kanno, H. et al. | British Library Conference Proceedings | 2004


    Laser machinable glass [5662-06]

    Koyo, H. / Shojiya, M. / Tsunetomo, K. et al. | British Library Conference Proceedings | 2004


    Micro-machining of silicon and glass with picosecond lasers [5662-115]

    Raciukaitis, G. / Brikas, M. / SPIE et al. | British Library Conference Proceedings | 2004


    Reliability of high-power multimode pump modules [5662-78]

    Pflueger, S. / Duesterberg, R. / Rossin, V. et al. | British Library Conference Proceedings | 2004


    High-speed micro welding of thin metal sheets [5662-47]

    Russ, A. / Leimser, M. / Dausinger, F. et al. | British Library Conference Proceedings | 2004