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    Titel :

    Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr~0~.~3Ti~0~.~7)O~3 thin films [5209-14]


    Beteiligte:

    Kongress:

    Conference; 3rd, Materials for infrared detectors



    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    8 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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    Superlattices for very long wavelength infrared detectors [5209-08]

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