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    Titel :

    Comparative linewidth measurements on chrome and MoSi structures using newly developed microscopy methods [5188-40]



    Kongress:

    Annual conference, Advanced characterization techniques for optics, semiconductors, and nanotechnologies



    Erscheinungsdatum :

    2003-01-01


    Format / Umfang :

    11 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Advanced transmission electron microscopy for nano-optics (Invited Paper) [5188-28]

    Kaiser, U. A. / International Society for Optical Engineering | British Library Conference Proceedings | 2003


    Comparison of roughness measurement with atomic force microscopy and interference microscopy [5188-49]

    Kuhle, A. / Rosen, B.-G. / Garnaes, J. et al. | British Library Conference Proceedings | 2003


    Photothermal microscopy and laser damage in optical components (Invited Paper) [5188-22]

    Commandre, M. J. / Natoli, J. Y. / Amra, C. et al. | British Library Conference Proceedings | 2003


    New magnetic semiconductor sulfospinels with cobalt [5188-47]

    Saifullaeva, D. A. / Solieva, S. F. / International Society for Optical Engineering | British Library Conference Proceedings | 2003


    Mueller matrix polarimeter in 157 nm [5188-18]

    Jin, L. / Kowa, H. / Otani, Y. et al. | British Library Conference Proceedings | 2003