Aspheric surface fabrication in nanometer-level accuracy by numerically controlled plasma chemical vaporization machining (CVM) and elastic emission machining (EEM) [4782-35]
conference, X-ray mirrors crystals and multilayers ; 2002 ; Seattle, WA
2002-01-01
6 pages
Aufsatz (Konferenz)
Englisch
X-ray mirrors , SPIE , crystals , multilayers
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Topography measurement of nanometer synchrotron optics [4782-02]
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