Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition (ECR-PECVD): A Versatile Tool in the Fabrication of Optoelectronic Devices
International symposium; 1st, Integrated optoelectronics ; 2002 ; Philadelphia, PA
2002-01-01
20 pages
Aufsatz (Konferenz)
Englisch
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