Surface Assessment of a Chemically Assisted Ion Beam Etched InP Sample Using Scanning Electron Microscopy and Atomic Force Microscopy Techniques
Pacific Rim conference; 4th, Lasers and electro-optics; CLEO/Pacific Rim 2001 ; 2001 ; Chiba, Japan
2001-01-01
II-224-225
Held with InterOpto2001. IEEE cat no 01TH8557
Aufsatz (Konferenz)
Englisch
CLEO , Pacific Rim , lasers , IEEE , electro-optics , interopto , CLEO/Pacific Rim
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