Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Novel results of laser precision microfabrication with excimer lasers and solid state lasers [4088-22]


    Beteiligte:
    Stamm, U. (Autor:in) / Fiebig, M. (Autor:in) / Govorkov, S. V. (Autor:in) / Mayer, E. E. (Autor:in) / Osmanov, R. (Autor:in) / Scaggs, M. J. (Autor:in) / Slobodchikov, E. V. (Autor:in) / Wiessner, A. O. (Autor:in) / Basting, D. (Autor:in) / Miyamoto, I.

    Kongress:

    1st, International symposium on laser precision microfabrication ; 2000 ; Omiya, Japan



    Erscheinungsdatum :

    2000-01-01


    Format / Umfang :

    6 pages


    Anmerkungen:

    Described as proceedings. Also known as LPM 2000




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    Laser precision microfabrication in Japan [4088-01]

    Miyamoto, I. / Ooie, T. / Takeno, S. et al. | British Library Conference Proceedings | 2000


    Laser microcaving of steel with solid state lasers [4088-44]

    Abeln, T. / Radtke, J. / Weikert, M. et al. | British Library Conference Proceedings | 2000


    High-resolution contact lithography by excimer lasers [4088-73]

    Huang, H. / Lu, D. / Du, L. et al. | British Library Conference Proceedings | 2000


    Novel technology for laser precision microfabrication of hard materials [4088-21]

    Sugioka, K. / Midorikawa, K. / Japan Laser Processing Society et al. | British Library Conference Proceedings | 2000