Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography [3767-37]
Conference, EUV, X-ray, and neutron optics and sources ; 1999 ; Denver, CO
1999-01-01
12 pages
Aufsatz (Konferenz)
Englisch
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Multilayer coated optics for an alpha-class extreme ultraviolet lithography system [3767-31]
British Library Conference Proceedings | 1999
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Polycapillary collimator for laser-generated plasma source x-ray lithography [3767-05]
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