Control of Mo/Si multilayers for soft x-ray performance [3767-35]
Conference, EUV, X-ray, and neutron optics and sources ; 1999 ; Denver, CO
1999-01-01
9 pages
Aufsatz (Konferenz)
Englisch
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DataCite | 1917
High-uniformity collimator for x-ray proximity lithography [3767-06]
British Library Conference Proceedings | 1999
|EUV spectroscopy of ultrafast capillary discharges [3767-52]
British Library Conference Proceedings | 1999
|Microfocusing VLS-grating-based beamline for advanced microscopy [3767-38]
British Library Conference Proceedings | 1999
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