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    Titel :

    Pulsed-laser deposition of high-purity TiN thin films [3550-62]


    Beteiligte:

    Kongress:

    Conference; 2nd, Laser processing of materials and industrial applications ; 1998 ; Beijing



    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    8 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Laser-assisted chemical vapor deposition of diamond films [3550-08]

    Ren, D. / Hu, X. / Liu, F. et al. | British Library Conference Proceedings | 1998


    KrF excimer laser deposition of titanium thin films on silicon substrates [3550-54]

    Lu, L. W. / Lu, Y. F. / Hong, M. H. et al. | British Library Conference Proceedings | 1998


    Plasma diagnostics in KrF excimer laser deposition of Ti thin films [3550-74]

    Hong, M. H. / Lu, Y. F. / Ho, T. M. et al. | British Library Conference Proceedings | 1998


    Excimer laser sputtering deposition of skutterudites for thermoelectric applications [3550-56]

    Durand, H.-A. / Ito, K. / Kataoka, I. et al. | British Library Conference Proceedings | 1998


    Laser cleaning of magnetic disks [3550-50]

    Song, W. D. / Lu, Y. F. / Hong, M. H. et al. | British Library Conference Proceedings | 1998