Analyses of light diffracted on rough surfaces to measure in-plane displacements using a heterodyne interferometer [3478-23]
Conference; 9th, Laser interferometry: applications ; 1998 ; San Diego; CA
1998-01-01
11 pages
Aufsatz (Konferenz)
Englisch
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British Library Conference Proceedings | 1998
|DataCite | 1912
Precise measurement of nonoptical surfaces by an oblique incidence interferometer [3478-20]
British Library Conference Proceedings | 1998
|Direct group-delay measurement and 3D profilometry using a white-light interferometer [3478-06]
British Library Conference Proceedings | 1998
|Fourier transform moire deflectometry [3478-42]
British Library Conference Proceedings | 1998
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