Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA
1998-01-01
14 pages
Aufsatz (Konferenz)
Englisch
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DataCite | 1908
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
British Library Conference Proceedings | 1998
|MEMS-based diffractive optical-beam-steering technology [3276-07]
British Library Conference Proceedings | 1998
|System integration of micro-optical systems for beam steering and modulation applications [3276-08]
British Library Conference Proceedings | 1998
|Nonsilicon micromachining for MOEMS elements [3276-28]
British Library Conference Proceedings | 1998
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