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    Titel :

    Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]



    Kongress:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Erscheinungsdatum :

    1998-01-01


    Format / Umfang :

    14 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Nr. 3276

    DataCite | 1908


    Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]

    Goetz, B. / Martin, T. / Buecker, P. et al. | British Library Conference Proceedings | 1998


    MEMS-based diffractive optical-beam-steering technology [3276-07]

    Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998


    System integration of micro-optical systems for beam steering and modulation applications [3276-08]

    Gloeckner, S. / Dannberg, P. / Goering, R. et al. | British Library Conference Proceedings | 1998


    Nonsilicon micromachining for MOEMS elements [3276-28]

    Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. et al. | British Library Conference Proceedings | 1998