Polymer guided-wave integrated optics: an enabling technology for micro-opto-electro-mechanical systems (Invited Paper) [3008-13]
Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA
1997-01-01
12 pages
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
British Library Conference Proceedings | 1997
|Optical characterization methods of InP-based micro-opto-electro-mechanical systems [3008-29]
British Library Conference Proceedings | 1997
|Micro-Opto-Electro-Mechanical Systems
British Library Conference Proceedings | 2000
|Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]
British Library Conference Proceedings | 1997
|Merging micro-optics with micromechanics: micro-opto-electro-mechanical (MOEM) devices
British Library Conference Proceedings | 1994
|