Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Realizing micro-opto-electro-mechanical devices through a commercial surface-micromachining process (Invited Paper) [2687-05]


    Beteiligte:

    Kongress:

    Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA



    Erscheinungsdatum :

    1996-01-01


    Format / Umfang :

    13 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Micro-size ball lenses for micro-optics: theory and experiment (Invited Paper) [2687-13]

    Yang, L. / Chang, K. W. / Trott, G. R. et al. | British Library Conference Proceedings | 1996


    Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]

    Clark, R. L. / Karpinisky, J. R. / Hammer, J. A. et al. | British Library Conference Proceedings | 1997


    Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding [2687-03]

    Koehler, U. / Guber, A. E. / Bier, W. et al. | British Library Conference Proceedings | 1996


    FPAs and thin film binary optic microlens integration (Invited Paper) [2687-09]

    Motamedi, M. E. / Tennant, W. E. / Melendes, R. et al. | British Library Conference Proceedings | 1996


    Nr. 2687

    DataCite | 1897