1–4 von 4 Ergebnissen
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    A Novel Temperature-Sensing System for Multi-Layered Substrate in Dry Etching Processes

    Takeda, K. / Ito, M. / Ohta, T. et al. | British Library Conference Proceedings | 2004

    Micro-machining Process for Optical Device Employing Pulse-modulated Electron-Beam-Excited Plasma

    Ohta, T. / Tomekawa, Y. / Ito, M. et al. | British Library Conference Proceedings | 2004

    Contact Resistance of a Cold Plate in EFFU (Exposed Facility Flyer Unit)

    Fujita, T. / Ito, M. / Akiyoshi, R. et al. | British Library Conference Proceedings | 1993

      Contact Resistance of a Cold Plate in EFFU (Exposed Facility Flyer Unit)

      Fujita, T. / Ito, M. / Akiyoshi, R. et al. | British Library Conference Proceedings | 1993