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+keyword:(optical metrology)
X-ray study of surfaces and interfaces [4449-31]
X-ray investigations of a near surface layer of metal samples [4099-33]
New procedure for the optical characterization of high-quality thin films [4099-16]
X-ray study of the roughness of surfaces and interfaces [4099-12]
Advanced methods for surface and subsurface defect characterization of optical components [4099-34]
DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]
Microroughness analysis of thin film components for VUV applications [4099-13]