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technology
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keywords:(micromachine technology)
Replication of diffractive gratings using embossing into UV-cured photopolymers [3879-24]
Fabrication of multilevel silicon diffractive lenses for terahertz frequencies [3879-08]
Miniaturized achromatic hybrid objective containing LIGA-made microlenses [3879-23]
Approximation of refractive micro-optical profiles by minimal surfaces [3879-02]
3D silicon photonic lattices: cornerstone of an emerging photonics revolution [3874-200]
Electrokinetic microfluidic systems [3874-100]
High-frequency gratings as polarization elements [3879-15]
Progress in gray-tone lithography and replication techniques for different materials [3879-11]
Potential of dry etching for the fabrication of fused-silica micro-optical elements [3879-06]
Refractive microlens array integration with linear high-power semiconductor laser array [3879-19]
Concept for zero-alignment micro-optical systems [3879-18]
Microlens array fabrication through crosslinking photopolymerization [3879-04]
Mid-infrared refractive optical elements made in a polymer matrix [3879-03]
High-efficiency computer-generated holograms [3879-16]
Quasi-continuous mask-coding method for fabricating diffractive optical elements [3879-12]
Noise reduction in the recording of holographic masks in photoresist [3879-25]