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keywords:("semiconductor")
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Semiconductors
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keywords:("Semiconductors")
Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]
Standardization in optics characterization (Invited Paper) [4099-14]
Investigation on total scattering at 157 nm and 193 nm [4099-09]
New procedure for the optical characterization of high-quality thin films [4099-16]
Reliable determination of wavelength dependence of thin film refractive index [5188-25]
Optimization of optical coatings for the UV/VUV range (Invited Paper) [5188-11]
Microroughness analysis of thin film components for VUV applications [4099-13]