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mikromechanisches Gerät
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keywords:("mikromechanisches Gerät")
Acoustically generated micromachined jet arrays for micropropulsion applications
Adaptive filter for a miniature MEMS based attitude and heading reference system
A low-g 3 axis accelerometer for emerging automotive applications
Concepts using optical MEMS array for ladar scene projection
Design and performance of the SAR10 rate gyro
Electroactive-polymer-based MEMS for aerospace and medical applications
High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes
High G MEMS accelerometer for Compact Kinetic Energy Missile (CKEM)
High temperature pressure sensors - Potentials for new concepts in automotive applications
Micro-electro-mechanical acceleration-sensitive switch
Microfabrication and test of an integrated colloid thruster
Micromachined sensors for advanced microsystems