Synonyme wurden verwendet für:
MEMS
•
System
•
mikroelektromechanisches System
Suche ohne Synonyme:
keywords:(MEMS (mikroelektromechanisches System))
CANEUS2006-11038 Two Dimensional Scanning LIDAR for Planetary Explorer
A Vertical-Comb Torsion Mirror with Distributed Gaps for Suppressing In-Plane Instability
An Optical Lens Scanner with Electrostatic Comb Drive XY-Stage
A Two-Mask Process for Self-Assembled Vertical Comb Drive Mirrors
Optically Assisted Electrostatic Actuation Mechanism