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Multicrystalline silicon
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Technology news. Micromechanical actuators control aircraft wing
Motorola and MEMMS: the way up to a surface micromachined accelerometer
Low dimensional structures and devices: micro- and nano-technology
Kleine Größe - großer Nutzen. Dreiachsige "Low-g"-Beschleunigungssensoren
Fabrication technology for an integrated surface-micromachined sensor
Fabrication of large photovoltaic arrays in space from lunar materials
Drehratensensor für die Fahrdynamikregelung. Kfz-Elektronik
Development of high‐performance multicrystalline silicon for photovoltaic industry