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Microelectromechanical systems
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keywords:("Microelectromechanical systems")
An Optical Lens Scanner with Electrostatic Comb Drive XY-Stage
A Vertical-Comb Torsion Mirror with Distributed Gaps for Suppressing In-Plane Instability
A Two-Mask Process for Self-Assembled Vertical Comb Drive Mirrors
Optically Assisted Electrostatic Actuation Mechanism