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1–10 von 66 Ergebnissen
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    AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]

    Frost, F. / Hirsch, D. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measuring the scatter distribution of PSL spheres on Si wafers using a fast calibrated CMOS photodetector array [4449-20]

    Rinder, T. / Rothe, H. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]

    Saito, T. / Saito, J. / Nakamura, E. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Polarized light scattering from metallic particles on silicon wafers [4449-39]

    Kim, J. H. / Ehrman, S. H. / Mulholland, G. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of the elastic constants of nanometric films [4449-16]

    Beghi, M. G. / Bottani, C. E. / Bassi, A. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries