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Feinwerktechnik
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keywords:("Feinwerktechnik")
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]
MEMS-based diffractive optical-beam-steering technology [3276-07]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]
In-package active fiber optic micro-aligner [3276-20]
MEMS-based microgratings: preliminary results of novel configurations [3276-19]
Fill factor improvement using microlens arrays [3276-12]
Resonating large-angle and low-consumption micromachined optical scanner [3276-09]
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Optimum design of GaAs waveguides intersecting modulator [3276-13]
Optical measurement of LIGA milliengine performance [3276-02]
System integration of micro-optical systems for beam steering and modulation applications [3276-08]
MOEM scan engine for bar code reading and factory automation (Invited Paper) [3276-06]
Polymer waveguides for telecom, datacom, and sensor applications (Invited Paper) [3276-01]
Evanescent field sensing: cavity-coupled refractive index sensor (CRIS) [3276-21]