Synonyme wurden verwendet für: metrology
Suche ohne Synonyme: keywords:(optical metrology)

41–60 von 95 Ergebnissen
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    Microstructure of thin films: correlation with laser damage threshold [4449-35]

    Ciosek, J. / Paszkowicz, W. / Pankowski, P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al~2O~3/Ta/SiO~2/Si [4449-30]

    Leng, J. / Opsal, J. L. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]

    Johs, B. D. / Hale, J. / Ianno, N. J. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Quasi-confocal extended field surface sensing [4449-23]

    Cohen-Sabban, J. / Gaillard-Groleas, J. / Crepin, J.-P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Automated high-accuracy measuring system for specular microreflectivity [4449-15]

    Grunwald, R. / Nerreter, S. / Tomm, J. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Polarized light scattering from metallic particles on silicon wafers [4449-39]

    Kim, J. H. / Ehrman, S. H. / Mulholland, G. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Measurement of the elastic constants of nanometric films [4449-16]

    Beghi, M. G. / Bottani, C. E. / Bassi, A. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Stitching interferometry of aspherical surfaces [4449-34]

    Hansel, T. / Nickel, A. / Schindler, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]

    Vaughnn, D. / Watkins, C. / Anderson, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Measuring small absorption losses of laser pulses in fused silica by a pump and probe technique [4449-03]

    Muhlig, C. / Kufert, S. / Bark-Zollmann, S. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    How to measure sub-ppm optical homogeneity in fused silica: impact of temperature on accuracy and reproducibility [4449-14]

    Schoenfeld, D. / Kuehn, B. / Steinert, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project (Invited Paper) [4449-27]

    Rothe, H. / Wilkening, G. / Huser, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Standardization of the measurement of laser-induced damage threshold and material absorption [4449-12]

    Wood, R. M. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology

    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology