21–40 von 65 Ergebnissen
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    Feasibility and applicability of integrated metrology using spectroscopic ellipsometry in a cluster tool [4449-10]

    Boher, P. / Piel, J. P. / Stehle, J. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats [4449-22]

    Vaughnn, D. / Watkins, C. / Anderson, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    How to measure sub-ppm optical homogeneity in fused silica: impact of temperature on accuracy and reproducibility [4449-14]

    Schoenfeld, D. / Kuehn, B. / Steinert, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm [4449-06]

    Boher, P. / Evrard, P. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]

    Schubert, M. / Kasic, A. / Figge, S. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Methods, error influences, and limits for the ultraprecise measurement of slope and figure for large, slightly nonflat, or steep complex surfaces [4099-18]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]

    Gunster, S. / Ristau, D. / Bosch, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project (Invited Paper) [4449-27]

    Rothe, H. / Wilkening, G. / Huser, D. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Standardization of the measurement of laser-induced damage threshold and material absorption [4449-12]

    Wood, R. M. / SPIE | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    X-ray study of the roughness of surfaces and interfaces [4099-12]

    Kozhevnikov, I. V. / Asadchikov, V. E. / Bukreeva, I. N. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]

    Kadkhoda, P. / Blaschke, H. / Kohlhaas, J. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]

    Brunner, R. / Bischoff, J. / Rudolf, K. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Measurement of the elastic constants of nanometric films [4449-16]

    Beghi, M. G. / Bottani, C. E. / Bassi, A. L. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    X-ray study of surfaces and interfaces [4449-31]

    Asadchikov, V. E. / Bukreeva, I. N. / Duparre, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Automated high-accuracy measuring system for specular microreflectivity [4449-15]

    Grunwald, R. / Nerreter, S. / Tomm, J. W. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: optical metrology , semiconductor industries , data storage industries

    Microroughness analysis of thin film components for VUV applications [4099-13]

    Ferre-Borrull, J. / Duparre, A. / Steinert, J. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: optical metrology , semiconductor industries , data storage industries