Synonyme wurden verwendet für:
data
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data storage
•
for
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industries
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metrology
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semiconductor,
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storage
Suche ohne Synonyme:
title: Optical metrology roadmap for the semiconductor, optical, and data storage industries
X-ray study of the roughness of surfaces and interfaces [4099-12]
Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]
Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]
Diffractive solid immersion lenses: characterization and manufacturing [4449-29]
Fast-scanning ellipsometry for thin film characterization [4099-39]
Measurement of the elastic constants of nanometric films [4449-16]
X-ray study of surfaces and interfaces [4449-31]
Numerical investigation of the resolution in solid immersion lens systems [4099-28]
Automated high-accuracy measuring system for specular microreflectivity [4449-15]
Effects of particle shape on particle identification and scatter predictions [4449-18]
Microroughness analysis of thin film components for VUV applications [4099-13]