1–10 von 14 Ergebnissen
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    EUV Lithography: An Evolutionary Path to Shorter Wavelengths and Smaller Critical Dimensions

    Attwood, D. / Zernike, F. | British Library Online Contents | 1994

    Model-based vehicle detection and classification using orthographic approximations

    Sullivan, G. D. / Baker, K. D. / Worrall, A. D. et al. | British Library Online Contents | 1997

    Tabletop Lasers in the Extreme Ultraviolet

    Rocca, J. J. / Kapteyn, H. C. / Attwood, D. T. et al. | British Library Online Contents | 2006

    New demonstration technique of 20 nm spatial resolution soft X-ray microscopy

    Chao, W. / Anderson, E. / Denbeaux, G. et al. | IEEE | 2003

    Experimental analysis of high-resolution soft x-ray microscopy [4499-23]

    Chao, W. / Anderson, E. H. / Denbeaux, G. et al. | British Library Conference Proceedings | 2001

    High-resolution soft x-ray microscopy [4146-24]

    Chao, W. / Anderson, E. H. / Denbeaux, G. et al. | British Library Conference Proceedings | 2000

    Soft X-ray microscopy and EUV lithography: imaging in the 20-40 nm regime

    Attwood, D. / Anderson, E. / Chao, W. et al. | IEEE | 2003

    Recent advances in EUV phase-shifting point diffraction interferometry [3767-22]

    Naulleau, P. / Goldberg, K. A. / Lee, S. H. et al. | British Library Conference Proceedings | 1999