Particle deposition was measured during processing of flight hardware for the second Hubble Space Telescope Servicing Mission. Silicon wafer witness plates were used to collect the particles. The ESTEK laser scanner instrument counted and sized the particles on the witness plates. The numbers of particles that are counted are placed in six size bins that cover the range from 2.5 my m to greater than 750 my m. This paper describes the results of the measurements and presents an analytical method for calculating the percent area coverage (PAC). The analytical technique determines a mean particle size for each bin based on an approximation of a log normal distribution. The log normal distribution used for the analysis is the log-log2 distribution used in MIL-STD-1246. The precision of the measurements is good, but accuracies need to be determined.
Particle deposition measurements using silicon wafer witness plates and a laser scanner
1998
8 Seiten, 8 Quellen
Aufsatz (Konferenz)
Englisch
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