Although gas purity and safety will always be key issues, keeping process tools up and running is the chief concern in specialty gas delivery. You've heard tales of the 'billion-dollar fab'. While it's not quite here yet, a big chunk of those megadollars will go toward capital equipment. So it's no wonder that keeping process tools up and running has become a critical issue. It's also where specialty gas delivery can reflect directly on a company's bottom line. One result has been growing involvement by gas suppliers in device makers' total system needs.
How specialty gas delivery impacts the uptime equation
Einfluß der Lieferung von Spezialglas auf die Uptime-Gleichung
Semiconductor International ; 15 , 1 ; 44-48
1992
4 Seiten, 2 Bilder
Aufsatz (Zeitschrift)
Englisch
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