This paper focuses on the development of a low cost micromachined Corioles Vibrating Gyroscope (CVG) realized according to the decoupling principle DAVED-LL (Decoupled Angular Velocity Detector) where the two oscillation modes are of linear shape. By an optimised design the coupling of both oscillation modes can be suppressed, the so-called quadrature signal can be reduced signficantly and thus the sensor performance can be improved to meet the demands and specifications of automotive applications. The DAVED-LL prototypes show a rms noise in the range of 0.05 degree/s and a quadrature signal between 50 - 70 degree/s.
Micromachined gyroscope in silicon-on-insulator (SOI) technology
Mikromaschinell hergestelltes Gyroskop in Silicon-on-Insulator (SOI)-Technologie
2002
5 Seiten, 3 Bilder, 1 Tabelle, 8 Quellen
Aufsatz (Konferenz)
Englisch
Micromachined Gyroscope in Silicon-On-Insulator (SOI) Technology
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