This paper focuses on the development of a low cost micromachined Corioles Vibrating Gyroscope (CVG) realized according to the decoupling principle DAVED-LL (Decoupled Angular Velocity Detector) where the two oscillation modes are of linear shape. By an optimised design the coupling of both oscillation modes can be suppressed, the so-called quadrature signal can be reduced signficantly and thus the sensor performance can be improved to meet the demands and specifications of automotive applications. The DAVED-LL prototypes show a rms noise in the range of 0.05 degree/s and a quadrature signal between 50 - 70 degree/s.


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    Titel :

    Micromachined gyroscope in silicon-on-insulator (SOI) technology


    Weitere Titelangaben:

    Mikromaschinell hergestelltes Gyroskop in Silicon-on-Insulator (SOI)-Technologie


    Beteiligte:
    Gaisser, A. (Autor:in) / Frech, J. (Autor:in) / Hoelzer, G. (Autor:in) / Nommensen, P. (Autor:in) / Braxmaier, M. (Autor:in) / Link, T. (Autor:in) / Geiger, W. (Autor:in) / Schwarz, U. (Autor:in) / Sandmaier, H. (Autor:in) / Lang, W. (Autor:in)


    Erscheinungsdatum :

    2002


    Format / Umfang :

    5 Seiten, 3 Bilder, 1 Tabelle, 8 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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