Much of the electronics of future cars will be physically integrated together with sensors and actuators to mechatronic systems. Depending on the location of such a system, the maximum temperature experienced by the electronics may exceed the mil-specified limit of 125 Cel. The strict low cost requirements in the automotive industry favour only silicon-based electronic systems as promising approach for mass production. In this article, first of all the influence of temperature on device characteristic will be discussed. Then, the advantage of SOI devices with respect to elevated operation temperatures will be demonstrated. Finally, pro cesses for the fabrication of SOI materials are presented.
Materials for electronic systems in automotive applications - silicon on insulator (SOI)
Werkstoffe für fahrzeugspezifische Elektronikschaltungen - Silizium auf Isolator (SOI)
2002
12 Seiten, 6 Bilder, 1 Tabelle, 10 Quellen
Aufsatz (Konferenz)
Englisch
Materials for Electronic Systems in Automotive Applications - Silicon On Insulator (SOI)
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