This paper reports on a silicon angular rate sensor designed for automotive applications like overroll protection and electronic skidding protection. The sensor is based on a tuning fork principle with the tines being piezoelectrically excitated perpendicular to the wafer surface. Due to the Coriolis effect, an angular rate parallel to the axis of the stem generates a periodic torque, which results in a torsional oscillation of the stem. This torsional oscillation is detected with an implanted piezoresistor located in the middle of the stem. A slot in the center of the stem enhances the shear stress at the read-out piezoresistor position resulting in a higher sensitivity. The latest sensor design with a split electrode allows an electronic compensation of mechanical imbalance in order to reduce the sensor offset and offset drift. Additionally, this electrode configuration can generate a periodic torque to perform a permanent test of the sensor functioning and the sensitivity during operation.
Tuning fork silicon angular rate sensor with enhanced performance for automotive applications
2000
5 Seiten, 27 Quellen
Aufsatz (Konferenz)
Englisch
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