This paper presents the design and performance of an ultra-sensitive position sensor dedicated to future space accelerometers. The electromechanical transducer is based on a capacitive scheme and aims at detecting the motion of a proof-mass in an electrostatic accelerometer. A new design called 'area variation capacitance' is investigated to minimize back-action forces exerted on the proof mass. The resolution of that position sensor is a few tenths of picometer in the 0-1 Hz bandwidth. The position is digitized with a sigma-delta converter to feed the control laws of the accelerometer.
Capacitive detection scheme for space accelerometers applications
Sensors and Actuators, A, Physical ; 78 , 2-3 ; 92-98
1999
7 Seiten, 14 Quellen
Aufsatz (Zeitschrift)
Englisch
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