A microfabricated biosensor based on the streaming current method is presented in this work. The microfabricated sensor consists of a silicon microchannel, which is enclosed with a glass capping to form a closed microchannel. The depth of the microchannel is approximately 10 µm in width and length varying from 50 to 100 µm. The silicon is etched using deep reactive ion etching (DRIE) to form a microchannel. For the capping of the channel, a glass wafer of type Borofloat is used and anodically bonded to the silicon wafer to form a closed microchannel. The microchannel is then functionalized to be specific to certain biomarkers which can be a potential biomarker for cancer, for example. The method used for detection is called the streaming current method. In this method, fluid is flown through the microchannel with high pressure close to six bars. The surface of the silicon is oxidized, which has a zeta potential of approximately 2.7. Depending on the type of fluid the charge concentration varies. By having a pressure in the channel, the charges get distributed as an anode and cathode at the inlet and outlet electrodes of the microfluidic channels. At a fixed potential, a streaming current is observed, which is proportional to the charge accumulated. The difference between the streaming current with and without the biomarker is correlated to the concentration. Hence, a biosensor based on the streaming current method can be realized, which could be used for potential cancer biomarker detection.
Microfabricated Biosensor for Detection of Disease Biomarkers Based on Streaming Current Method
Lect. Notes Electrical Eng.
International Conference on Robotics, Control, Automation and Artificial Intelligence ; 2022 November 24, 2022 - November 26, 2022
2023-11-18
9 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
Microfabricated ice-detection sensor
Tema Archiv | 1997
|Advanced Microfabricated Hydrogen Sensors
Online Contents | 1996
Microfabricated Electrospray Propulsion
NTRS | 2011
|Microfabricated Liquid Rocket Motors
NTRS | 2003
|